X-Ray Metrology in Semiconductor Manufacturing

Name: X-Ray Metrology in Semiconductor Manufacturing
Brand: Bookshop
SKU: 9780849339288
Price: 897.00 PLN
Availability: InStock

897,00 zł 1.113,00 zł

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296 psl.

2006 m.

Kietas viršelis

Kod kreskowy: 9780849339288

Opis

Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.

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X-Ray Metrology in Semiconductor Manufacturing

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